VACUUM DIAGNOSTICS
RGA Residual Gas AnalyzerRESIDUAL GAS ANALYZER
Traditional pressure gauges can only tell you that the pressure has changed,
while RGA can tell you why it has changed.
It's the "black box" of vacuum processes, helping developers shorten development cycles and assisting manufacturers in ensuring zero-defect output. Unlike ordinary vacuum gauges (which can only measure pressure), the RGA can measure the partial pressure of every residual gas in the system. Whether it's water vapor, hydrocarbons, atmospheric leaks, or process byproducts, the RGA gives you a clear picture of the chamber's condition.。
Application areas
Semiconductor manufacturing process
Monitoring of CVD/PVD thin film deposition and ion implantation processes
Display panel technology
Gas purity and environmental control in panel vacuum manufacturing process.
Vacuum coating and surface treatment
Gas venting and residual gas composition analysis of the coating chamber.
Basic scientific research and high-energy physics experiments
Leak detection and cleanliness verification of ultra-high vacuum systems.
